3 rods CVD system

3 rods CVD system

Preparation of nano materials,Various CVD experiment, Thin film growth of SiNx and SiO2,Passivation of semiconductor devices and integrated circuits

Technical Specification

  • Reaction pipe clean pollution-free
  • Over-temperature alarm multiple protection
  • Can input N2, Ar2 and other gases
  • Highly automated control can save manpower cost unattended
technosinstruments technosinstruments