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Enhanced EELS & EDX Spectroscopy

Beam Precession in EELS & EDX spectroscopy enhance the signal reducing channeling effects. Automated quantification with statistical error analysis is available. Multiple scattering derived from an automatically measured relative thickness.

Feature of EELX & EDX

Highly-automated EELS elemental analysis.
Minimal user input required.
Multiple scattering derived from an automatically measured relative thickness
Automated quantification with statistical error analysis.

Elemental core-loss edges from several possible sources.
Theoretical : Hartree-Slater (Rez)
Intuitive workflow
Specify elements to quanitfy.