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Hybrid System
Hybrid System With FVCA
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Hybrid System With FVCA
This System is Hybrid System With FVCA and used for Ion—assisted and DLC deposition
Feature of Hybrid System With FVCA
Ion—assisted unbalanced magnetron sputtering system for DLC deposition
Highly charged partices with a high kinetic energy
High degree of flexibility for various substrate materials
Applications Hard coating Tribological coating Optical coating DLC coated Samples
Loading capacity 250 pcs/run (sample size:D10x20t)
