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PECVD System For Low Temp

PECVD System For Low Temp

This System is PECVD System For Low Temp. and it used for Small rf—PECVD and CNT synthesis.

Feature of Pecvd System For Low Temp

  • Small rf—PECVD system for CNT(Carbon Nano Tube) synthesis
  • Low temperature synthesis of CNTs(under about 400°C)
  • Heating range 400 — 600t
  • Applications CNTs growth
Pecvd System For Low Temp
Pecvd System For Low Temp
Pecvd System For Low Temp
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