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Solar Cell AR Coatings

Solar Cell AR Coatings

This System is PECVD System for Solar Cell AR Coatings And it used for SiNx dielectric material coating, SiOx dielectric material coating, SiOxNy dielectric material coating.

Feature of Solar Cell AR Coatings

  • Capacitively-Coupled PECVD system with loadlock chamber for R&D and small scale production
  • Automatic loadlock system with cassette
  • Uniform gas distribution through shower head
  • Substrate temperature uniformity: ≤±2℃ @400℃ within 6"
  • Thickness uniformity of deposited layers: <±2% @100nm within 6" (5mm edge exclusion)
  • Cycle time: <15mins
  • Average throughput Up to 21,600 wafers per year
Solar Cell AR Coatings
Solar Cell AR Coatings
Solar Cell AR Coatings
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