Three zone 1600 CVD System
Vacuum sintering Sintering of atmosphere protective, Vacuum coating All kinds materials sintering,All kinds CVD experiment that needs temperature gradient
Vacuum sintering Sintering of atmosphere protective, Vacuum coating All kinds materials sintering,All kinds CVD experiment that needs temperature gradient
| Heating temp. | Three zone Each dependent | Flange type | Water cooling vacuum flange |
| Length of zone | L:190mm;M:250mm;R:190mm | Vacuum system | Bipolar rotary vane pumps |
| Working temp. | L:1300OC;M:1600OC;R:1300OC; | System vacuum | 5～10Pa |
| Heating tube | Corundum Dia.60mm，Length.1300mm | Cooling type | 9L water cooling machine |
| Gas rods | 3 rods mass flow meters | Temp. Control system | PID control Accuracy ±1OC |
| Gas range | A:100SCCM;B:300SCCM;C:500SCCM | Power supply | AC:220V 50Hz |
| Vacuum testing | Digital vacuum gauge | Note | Customized with other |
