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Vacuum Furnace Series

Vacuum Furnace Series

This System is Vacuum Furnace Series and used for Display Material Purification Differential Evaporation of organic materials

Feature of Vacuum Furnace

  • Economic standard sputter system for R&D and small mass production
  • Two tiltable 4" sputter guns and one extra sputter gun port
  • Quartz tube conveniently exchangeable
  • Plug system movable in x, y, z direction
  • Process range 400 — 900t
  • Operated by PLC touch screen
Vacuum Furnace Series
Vacuum Furnace Series
Vacuum Furnace Series
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